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Temperature control of metal strip during high-rate vacuum coating

: Heinß, Jens-Peter; Lang, Peter; Ruppelt, Patrick


Surface and coatings technology 290 (2016), pp.39-42
ISSN: 0257-8972
Society of Vacuum Coaters (Annual Technical Conference) <58, 2015, Santa Clara/Calif.>
Journal Article, Conference Paper
Fraunhofer FEP ()
electron beam evaporation

Electron beam evaporation with deposition rates of hundreds of nanometer per second is predestined to fit large throughput. In a few cases, high-rate vacuum depositions demand effective cooling of the substrate to exploit their potential, otherwise substrate or layer temperature represents limiting factors. Therefore a new kind of cooling equipment for vacuum coating of metal strips was developed. As a result, the practical realized heat transfer coefficient (HTC) was increased from 50 W/m2 K for common cooling drums up to 1000 W/m2 K. The demonstrated heat transfer coefficients describe a distinctive performance increase compared to known state of the art. For the first time, a 10 μm aluminum high-rate deposition was realized without any alloying with steel strip. Extensions concerning the deposition rate or deposition of thick layers onto thin metal foils become feasible.