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Inorganic-organic hybrid polymers for information-technology from planar technology to 3-D nanostructures for application in photonic devices

: Houbertz, R.; Domann, G.; Popall, M.; Serbin, J.; Ovsianikov, A.; Chichkov, B.N.; Streppel, U.; Dannberg, P.; Bräuer, A.

Verein Deutscher Ingenieure e.V. -VDI-, Kompetenzfeld Nanotechnik:
Nanofair 2003 - new ideas for industry : Tagung Dresden, 20. und 21. November 2003
Düsseldorf: VDI-Verlag, 2003 (VDI-Berichte 1803)
ISBN: 3-18-091803-9
Nanofair <2, 2003, Dresden>
Conference Paper
Fraunhofer ISC ()
Fraunhofer IOF ()

Inorganic-organic hybrid polymers which are suitable for optical applications, were synthesized by hydrolysis/polycondensation reactions. The material can be processed by conventional photolithography as well as by two-photon processes using femtosecond laser pulses. The material will be briefly described and examples for 2- and 3-D lithography will be given, with particular emphasis on optical applications.