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Control of organic contamination in CMOS manufacturing

 
: Bügler, J.; Frickinger, J.; Zielonka, G.; Pfitzner, L.; Ryssel, H.; Schottler, M.

Kissinger, G. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing
Bellingham/Wash.: SPIE, 2001 (SPIE Proceedings Series 4406)
ISBN: 0-8194-4107-4
pp.82-91
Conference on In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing <2, 2001, Edinburgh>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-38087.html