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Effect of copper on the breakthrough voltage of Poly-Si - Poly-Si capacitors
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2001
Conference Paper
Titel
Effect of copper on the breakthrough voltage of Poly-Si - Poly-Si capacitors
Author(s)
Boehringer, M.
Pillion, J.E.
Erdmann, V.
Rygula, M.
Winz, K.
Brauchle, P.
Aquino, D.
Zhang, H.
Zahka, J.
Zielonka, G.
Hauber, J.
Hauptwerk
Ultra clean processing of silicon surfaces 2000
Konferenz
International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS) 2000
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB