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Fabrication of micro-optical components by high-precision embossing

 
: Otto, T.; Schubert, A.; Böhm, J.; Gessner, T.

Lee, S.H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining Technology for Micro-Optics
Bellingham/Wash.: SPIE, 2000 (SPIE Proceedings Series 4179)
ISBN: 0-8194-3835-9
pp.96-106
Conference "Micromachining Technology for Micro-Optics" <2000, Santa Clara/Calif.>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-38018.html