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The influence of target temperature and photon assistance on the radiation sefect formation in low-fluence ion-implanted silicon

 
: Barabanenkov, M.Y.; Gyulai, J.; Leonov, A.V.; Mordkovich, V.N.; Omelyanovskaya, N.M.; Ryssel, H.

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Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms 174 (2001), No.3, pp.304-310
ISSN: 0168-583X
English
Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-37766.html