Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

The influence of target temperature and photon assistance on the radiation sefect formation in low-fluence ion-implanted silicon

: Barabanenkov, M.Y.; Gyulai, J.; Leonov, A.V.; Mordkovich, V.N.; Omelyanovskaya, N.M.; Ryssel, H.


Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms 174 (2001), No.3, pp.304-310
ISSN: 0168-583X
Journal Article
Fraunhofer IISB ()