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Mu-m-resolved high resolution x-ray diffraction imaging for semiconductor quality control

 
: Lübbert, D.; Baumbach, T.; Härtwig, J.; Boller, E.; Pernot, E.

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Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms 160 (2000), No.4, pp.521-527
ISSN: 0168-583X
English
Journal Article
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()

: http://publica.fraunhofer.de/documents/N-37747.html