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Degradation of polyimide and polyethyleneterephtalate irradiated with 150 and 200 keV Ar+ ions, studied by RBS and ERD techniques
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2000
Journal Article
Titel
Degradation of polyimide and polyethyleneterephtalate irradiated with 150 and 200 keV Ar+ ions, studied by RBS and ERD techniques
Author(s)
Hnatowicz, V.
Perina, V.
Havranek, V.
Vosecek, V.
Novotny, J.
Vacik, J.
Svorcik, V.
Rybka, V.
Kluge, A.
Zeitschrift
Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms
DOI
10.1016/S0168-583X(99)00951-9
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB