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A versatile analog front-end for sensors based on piezoresistive silicon nanowire detection

: Leman, Olivier; Nikas, Antonios; Zhou, Haiyan; Lagos, Jorge-Luis; Vinchhi, Bakul Jitendra; Hauer, Johann; Jourdan, Guillaume; Rey, Patrice


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Circuits and Systems Society:
IEEE International Symposium on Circuits and Systems, ISCAS 2015. Proceedings. Vol.2 : 24-27 May 2015, Lisbon, Portugal
Piscataway, NJ: IEEE, 2015
ISBN: 978-1-4799-8392-6
ISBN: 978-1-4799-8391-9
ISBN: 978-1-4799-8390-2
International Symposium on Circuits and Systems (ISCAS) <2015, Lisbon>
Conference Paper
Fraunhofer IIS ()
zeitkontinuierliche Schaltungstechnik (TC); Mess-, Steuer- und Regelungstechnik; low power; low voltage design; intelligente Sensorsysteme; integrierte Sensoren

We present the design and implementation of an analog front-end for smart-sensors and measurement results with prototypes of acceleration micro-sensors. The technology used for sensor manufacturing features silicon nanowires as strain gauges. The proposed system supports Kelvin contacts scheme and sensor bias duty-cycling. A fully-differential amplifier with a sensor-degenerated common-mode rejection scheme implements sensor bias and readout with current re-use. Experimental results for the fabricated analog-front-end show a -89 dB non-linearity, a dynamic-range higher than 73 dB over the 1 mHz to 500 Hz bandwidth taking into account for sensor noise, a 540 μA consumption and operation at 1.7 V supply.