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Measuring acid generation efficiency in chemically amplified resists with all 3 beams

 

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Journal of vacuum science and technology B. Microelectronics and nanometer structures 17 (1999), pp.3356-3361
ISSN: 0734-211X
ISSN: 1071-1023
English
Journal Article
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/N-37724.html