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Light scattering of UV-optical components
5. International Workshop on Laser Beam and Optics Characterization 2000. Proceedings
Düsseldorf: VDI Technologiezentrum, 2000
|International Workshop on Laser Beam & Optics Characterization (LBOC) <5, 2000, Erice>|
| Conference Paper|
|Fraunhofer IOF ()|
| angle resolved scattering; total scattering measurement|
We discuss principles of light scattering measurements: angle resolved scattering (ARS), total scattering (TS) measurements, with special emphasize on the latter and on the DUV/VUV spectral region. The present stage and future requirements of standard procedure ISO 13696 are considered. Examples of measurements on substrates and thin film coatings are presented and related to roughness effects.