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Characterization of Cr-Al-C and Cr-Al-C-Y films synthesized by high power impulse magnetron sputtering at a low deposition temperature

: Berger, Olena; Leyens, Christoph; Heinze, Stefan; Boucher, R.; Ruhnow, Michael


Thin solid films 580 (2015), pp.6-11
ISSN: 0040-6090
Deutsche Forschungsgemeinschaft DFG
Journal Article
Fraunhofer IWS ()
Cr2AlC-MAX-phase; disordered solid solution; nanostructured mate

A focus point in this work was the study of the influence of a low substrate temperature, as well as the minor addition of Y (0.1-0.3 at.%), on the formation of the stable Cr2AlC-MAX (ternary alloy with general formula Mn + 1AXn: M = early transition metal, A = A-Group element, mostly IIIA or IVA, X = C or N, n = 1-3) phase. The coatings, deposited by High Power Impulse Magnetron Sputtering, consisted of a mixture of disordered solid solution (Cr,Al)2Cx and ordered Cr2AlC-MAX phase. All deposited coatings without and with 0.1-0.3 at.% Y addition were polycrystalline, and showed (110) texture and a columnar morphology. The measured strong lattice distortions along with the existence of the texture in the as-deposited samples indicate that compressive stress acts in the a-b plane and tensile perpendicular to this. A schematic model of the structural and chemical changes in the as-deposited layers due to deposition inhomogeneity and low deposition temperature, based on the X-ray diffraction, energy dispersive X-ray, scanning electron microscopy and magnetic measurements has been developed.