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Thermal and mechanical analysis of micromachined gas sensors

: Puigcorbe, J.; Vogel, D.; Michel, B.; Vila, A.; Gracia, I.; Cane, C.; Morante, J.R.


Journal of micromechanics and microengineering 13 (2003), No.5, pp.548-556
ISSN: 0960-1317
ISSN: 1361-6439
Journal Article
Fraunhofer IZM ()

In this paper, we present a complete thermomechanical study of a micromachined gas sensor substrate. The work has been carried out combining coupled electrothermomechanical three-dimensional finite element modelling simulations with electrical, infrared thermography and interferometric microscopy experimental measurements. The performances predicted by simulations, such as the power consumption (heating efficiency in air of 5.7 degreesC mW(-1)), the time response (19 ms), the membrane deflection during operation and the preferential failure sites in the micromachined substrate have been confirmed by experience. Their good agreement validates the model, and allows us to consider the adaptability of this design as a micromachined substrate for integrated gas sensors.