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Direct integrated strain sensors for robust temperature behaviour
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2015
Conference Paper
Titel
Direct integrated strain sensors for robust temperature behaviour
Author(s)
Haas, S.
Schramm, M.
Reuter, Danny
Loebel, K.-U.
Horstmann, J.T.
Geßner, Thomas
Hauptwerk
18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Konferenz
International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) 2015
DOI
10.1109/TRANSDUCERS.2015.7180892
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS