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Ti-silicide formation during isochronal annealing followed by in-situ ellipsometry
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2001
Journal Article
Titel
Ti-silicide formation during isochronal annealing followed by in-situ ellipsometry
Author(s)
Stark, T.
Gutowski, L.
Herden, M.
Grunleitner, H.
Kohler, S.
Hundhausen, M.
Ley, L.
Zeitschrift
Microelectronic engineering
DOI
10.1016/S0167-9317(00)00434-2
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB