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Ultrananocrystalline diamond thin-films for MEMS and moving mechanical assembly devices
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2001
Journal Article
Titel
Ultrananocrystalline diamond thin-films for MEMS and moving mechanical assembly devices
Author(s)
Krauss, A.R.
Auciello, O.
Gruen, D.M.
Jayatissa, A.
Sumant, A.
Tucek, J.
Mancini, D.C.
Moldovan, N.
Erdemir, A.
Ersoy, D.
Gardos, M.N.
Busmann, H.G.
Meyer, E.M.
Ding, M.Q.
Zeitschrift
Diamond and Related Materials
DOI
10.1016/S0925-9635(01)00385-5
Language
English
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Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM