English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low-pressure in different gas atmospheres
Details
Full
Export
Statistics
Options
2001
Journal Article
Titel
Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low-pressure in different gas atmospheres
Author(s)
Beichele, M.
Bauer, A.J.
Herden, M.
Ryssel, H.
Zeitschrift
Solid-State Electronics
DOI
10.1016/S0038-1101(01)00061-2
Language
English
google-scholar
View Details
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB