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Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low-pressure in different gas atmospheres

 
: Beichele, M.; Bauer, A.J.; Herden, M.; Ryssel, H.

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Solid-State Electronics 45 (2001), No.8, pp.1383-1389
ISSN: 0038-1101
English
Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-36915.html