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Silicon oxide films from the Plasmodul®
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2000
Journal Article
Titel
Silicon oxide films from the Plasmodul®
Author(s)
Walker, M.
Baumgärtner, K.M.
Feichtinger, J.
Kaiser, M.
Schulz, A.
Räuchle, E.
Zeitschrift
Vacuum
DOI
10.1016/S0042-207X(00)00152-4
Language
English
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Fraunhofer-Institut für Chemische Technologie ICT