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Monolithic integrated surface micromachined pressure sensors with analog on-chip linearization and temperature compensation

 
: Trieu, H.-K.; Knier, M.; Köster, O.; Kappert, H.; Schmidt, M.; Mokwa, W.

:

The Thirteenth Annual International Conference on Micro Electro Mechanical Systems 2000. Proceedings
Piscataway, NJ: IEEE, 2000
ISBN: 0-7803-5273-4
ISBN: 0-7803-5274-2
ISBN: 0-7803-5275-0
ISBN: 0-7803-5989-5
pp.547-550
International Conference on Micro Electro Mechanical Systems (MEMS) <13, 2000, Miyazaki>
English
Conference Paper
Fraunhofer IMS ()
capacitive pressure sensor; pressure sensor; surface micromachining; linearization; temperature compensation; on-chip linearization; programmable calibration parameter

Abstract
This paper introduces a noval family of monolithic integrated surface micromachined pressure sensors with both linearization and temperature compensation done on-chip. All sensor parameters are fully programmable and on-chip stored using integrated EEPROM. Surface micromachined capacitive pressure sensors are predestinated for monolithic integrated sensor systems due to their compatibility to a standard CMOS process. This enables a cost effective production. Compared with piezoresistive pressure sensors, the surface micromachined pressure sensors are superior with respect to high overpressure stability, simple packaging, ease of monolithic integration of signal conditioning electronics, low power consumption and small chip size.

: http://publica.fraunhofer.de/documents/N-368.html