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Deposition of piezoelectric films for energy harvesting

Manufacturing processes
 
: Barth, Stephan; Bartzsch, Hagen; Härter, H.

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Elektronikpraxis (2015), Sonderausgabe 16/2015 "The future of Microelectronics", Art. 510490
ISSN: 0341-5589
ISSN: 0341-5783
English
Journal Article, Electronic Publication
Fraunhofer FEP ()

Abstract
Autonomous sensors and smaller mobile electronics systems will become more important in the future of the Internet of Things. We introduce more efficient materials and production processes.

: http://publica.fraunhofer.de/documents/N-367439.html