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Highly reflecting aluminium-protected optical coatings for the vacuum-ultraviolet spectral range

: Yang, M.; Gatto, A.; Kaiser, N.


Applied optics 45 (2006), No.1, pp.178-183
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IOF ()
Ultraviolet, far; coating; materials and process characterization; optical properties

We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193 nm. Multilayer capping can provide reflectance of 93.4% at 193 nm, and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90% to 160 nm.