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Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays

Presented at the 14th International Conference on Nanoimprint and Nanoprint Technology, NNT 2015. 22-24 October 2015, Napa, California
 
: Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar

:
Poster urn:nbn:de:0011-n-3642830 (3.0 MByte PDF)
MD5 Fingerprint: 59f303cc531e7ba0ab4c73dd6f4b52a5
Created on: 4.11.2015


2015, 1 pp.
International Conference on Nanoimprint and Nanoprint Technology (NNT) <14, 2015, Napa/Calif.>
English
Poster, Electronic Publication
Fraunhofer IISB ()
PDMS; metal electrode; sputtering; patterning

: http://publica.fraunhofer.de/documents/N-364283.html