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Mikro-Elektro-Mechanisches System und Verfahren zum Herstellen desselben

MICROELECTROMECHANICAL SYSTEM AND METHOD FOR PRODUCING THE SAME
 
: Lisec, Thomas; Stoppel, Fabian

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Frontpage ()

DE 102014202763 A1: 20140214
German
Patent, Electronic Publication
Fraunhofer ISIT ()

Abstract
A microelectromechanical system comprises a deflectable actuator plate and a stop surface. An integral piezoelectric functional layer of the deflectable actuator plate is formed over an area (APS) of the actuator plate. The deflectable actuator plate is designed to implement a concave curvature in at least one driven or non-driven state, wherein the stop surface is arranged in a manner facing a concave side of the deflectable actuator plate defined by the concave curvature. The deflectable actuator plate is designed to provide a mechanical contact between the deflectable actuator plate and the stop surface in the state in which said deflectable actuator plate implements the concave curvature. In the other state, the deflectable actuator plate is arranged at a distance from the stop surface.

: http://publica.fraunhofer.de/documents/N-364100.html