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Laboratory LPP EUV reflectometer working with non-polarized radiation

: Loyen, L. van; Böttger, T.; Schädlich, S.; Braun, S.; Foltyn, T.; Leson, A.; Scholze, F.; Müllender, S.


Wetzig, K.:
13th Applied Surface Analysis Workshop 2004 : Dresden, September 14th - 17th 2004
Amsterdam: North-Holland, 2005 (Applied surface science 252.2005, Nr.1)
ISSN: 0169-4332
Applied Surface Analysis Workshop <13, 2004, Dresden>
Conference Paper, Journal Article
Fraunhofer IWS ()

A laboratory extreme ultraviolet reflectometer (EUVR) for the wavelength range from 10 to 16 nm was built at IWS Dresden using a gold target laser pulse plasma (Au-LPP) source. The peak reflectance and the center wavelength are reproduced in relative standard deviation of 0.2 and 0.02%, respectively. In contrast to measurements using linearly polarized s-adjusted synchrotron radiation at PTB, measurements with non-polarized radiation at the EUVR yield systematically lower values for the reflectance due to the smaller reflectance of the p-component at higher angles of incidence.