Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Nano patterning at Fraunhofer IPMS-CNT: Fabrication of silicon master for NIL via e-beam direct write

Poster presented at Workshop on µ-contact-printing and nanoimprint technology 2015; Dresden, Germany, 9th March 2015
 
: Thrun, Xaver; Choi, Kang-Hoon; Gutsch, Manuela; Hohle, Christoph; Rudolph, Matthias; Seidel, Konrad

:
Poster urn:nbn:de:0011-n-3625470 (901 KByte PDF)
MD5 Fingerprint: 01da5ffa1e0884b21f504c3ca643de0e
Created on: 15.10.2015


2015, 1 Folie
Workshop on µ-contact-printing and nanoimprint technology <2015, Dresden>
English
Poster, Electronic Publication
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-362547.html