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Influence of gas on cutting silicon with solid state laser
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2004
Conference Paper
Titel
Influence of gas on cutting silicon with solid state laser
Author(s)
Klotzbach, U.
Mälzer, S.
Kuntze, T.
Panzner, M.
Dötschel, M.
Sonntag, F.
Beyer, E.
Hauptwerk
Photon processing in microelectronics and photonics III
Konferenz
Conference "Photon Processing in Microelectronics and Photonics" 2004
DOI
10.1117/12.532133
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS