Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Influence of gas on cutting silicon with solid state laser
| Herman, P.R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Photon processing in microelectronics and photonics III : 26 - 29 January 2004, San Jose, California, USA
Bellingham/Wash.: SPIE, 2004 (SPIE Proceedings Series 5339)
ISBN: 0-8194-5247-5
pp.488-493 |
| Conference "Photon Processing in Microelectronics and Photonics" <2004, San Jose/Calif.> |
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| English |
| Conference Paper |
| Fraunhofer IWS () |