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Influence of gas on cutting silicon with solid state laser

 
: Klotzbach, U.; Mälzer, S.; Kuntze, T.; Panzner, M.; Dötschel, M.; Sonntag, F.; Beyer, E.

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Herman, P.R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Photon processing in microelectronics and photonics III : 26 - 29 January 2004, San Jose, California, USA
Bellingham/Wash.: SPIE, 2004 (SPIE Proceedings Series 5339)
ISBN: 0-8194-5247-5
pp.488-493
Conference "Photon Processing in Microelectronics and Photonics" <2004, San Jose/Calif.>
English
Conference Paper
Fraunhofer IWS ()

: http://publica.fraunhofer.de/documents/N-36165.html