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Microreliability, Nanoreliability - Reliability approach for the micro-nano interface region

 
: Michel, B.

Reichl, H. ; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Micro System Technologies 2005 : Micro Electro, Opto, Mechanical Systems & Components International Conference & Exhibition, October 5-6, 2005, Munich, Germany
Poing: Franzis, 2005
ISBN: 3-7723-7040-3
pp.223-226
International Conference on Micro Electro, Opto, Mechanical Systems & Components <2005, München>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-36164.html