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Design and development of an optical system for EUV-microscopy

 
: Foltyn, T.; Braun, S.; Gawlitza, P.; Leson, A.; Bergmann, K.; Neff, W.; Walter, K.

:

Khounsary, A.M. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA
Bellingham/Wash.: SPIE, 2004 (SPIE Proceedings Series 5533)
ISBN: 0-8194-5471-0
pp.37-46
Conference "Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications" <2004, Denver/Colo.>
English
Conference Paper
Fraunhofer IWS ()
Fraunhofer ILT ()

: http://publica.fraunhofer.de/documents/N-36135.html