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Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)

: Braun, S.; Bendjus, B.; Foltyn, T.; Menzel, M.; Schreiber, J.; Leson, A.


Khounsary, A.M. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA
Bellingham/Wash.: SPIE, 2004 (SPIE Proceedings Series 5533)
ISBN: 0-8194-5471-0
Conference "Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications" <2004, Denver/Colo.>
Conference Paper
Fraunhofer IWS ()