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Efficiency of a multilayer-Laue-lens with a 102 μm aperture

: Macrander, Albert T.; Kubec, Adam; Conley, Ray; Bouet, Nathalie; Zhou, Juan; Wojcik, Michael J.; Maser, Jörg M.


Applied Physics Letters 107 (2015), No.8, Art. 081904
ISSN: 0003-6951 (Print)
ISSN: 1077-3118
ISSN: 1931-9401 (online)
European Commission EC
ESF; 100087859; ENano
Journal Article
Fraunhofer IWS ()
diffraction; multilayer Laue lens; coupled wave theory; X-ray measurements

A multilayer-Laue-lens (MLL) comprised of WSi2/Al layers stacked to a full thickness of 102 μm was characterized for its diffraction efficiency and dynamical diffraction properties by x-ray measurements made in the far field. The achieved aperture roughly doubles the previous maximum reported aperture for an MLL, thereby doubling the working distance. Negative and positive first orders were found to have 14.2% and 13.0% efficiencies, respectively. A section thickness of 9.6μm was determined from Laue-case thickness fringes in the diffraction data. A background gas consisting of 90% Ar and 10% N2 was used for sputtering. This material system was chosen to reduce grown-in stress as the multilayer is deposited. Although some regions of the full MLL exhibited defects, the presently reported results were obtained for a region devoid of defects. The data compare well to dynamical diffraction calculations with Coupled Wave Theory (CWT) which provided confirmation of the optical constants and densities assumed for the CWT calculations.