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Optische Anordnung mit Strahlaufteilung

OPTICAL ARRAY COMPRISING A BEAM SPLITTER
 
: Klenke, Arno; Limpert, Jens; Otto, Hans-Jürgen; Tünnermann, Andreas

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Frontpage ()

DE 102014001252 A1: 20140203
German
Patent, Electronic Publication
Fraunhofer IOF ()

Abstract
Es wird eine Vorrichtung mit einer optischen Struktur, Stegen und einem elektrostatischen Aktuator mit einer Auslegerelektrode beschrieben, bei der die Stege die optische Struktur mit einer tragenden Struktur verbinden und der elektrostatische Antrieb ausgebildet ist, um die optische Struktur auszulenken.

 

The invention relates to an optical array comprising a splitting element (1) which splits an input beam (E) into at least two partial beams (T1, T2, T3, T4), at least one optical element (V1, V2, V3, V4, MV) through which at least one of the partial beams (T1, T2, T3, T4) propagates, and at least one combining element (4) which spatially superimposes the partial beams (T1, T2, T3, T4) into an output beam (A). The problem addressed by the invention is to provide an optical array which is improved over the prior art and which enables an effective and simple splitting of the input beam, in particular a laser beam with pulsed or continuous emission. The invention solves the problem in that the splitting element (1) and/or the combining element (4) each have a partially reflective element (2, 2') which reflects the radiation of the input beam (E) or of the output beam (A) two or more times, wherein the partially reflective element (2, 2') has zones (a, b, c, d) of differing reflectivity.

: http://publica.fraunhofer.de/documents/N-356597.html