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Integration and fabrication of PZT and metallic glass films for micro-mirror device
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2013
Conference Paper
Titel
Integration and fabrication of PZT and metallic glass films for micro-mirror device
Author(s)
Tsai, Y.-C.
Lee, J.-W.
Naono, T.
Lin, Y.-C.
Esashi, M.
Fujii, T.
Geßner, Thomas
Hauptwerk
Smart Systems Integration 2013. CD-ROM
Konferenz
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS