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Plasma assisted deposition of metal fluoride coatings

: Bischoff, M.; Gäbler, D.; Kaiser, N.


Applied optics 50 (2010), No.9, pp.C232-C238
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2010, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()

Most of the common metal fluorides were deposited by plasma-assisted electron beam evaporation. Coatings with high packing density and low extinction coefficient could be produced. The advantages in comparison to conventional deposition techniques are discussed.