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High-Accuracy Self-Alignment of Thin Silicon Dies on Plasma-Programmed Surfaces
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2014
Book Article
Titel
High-Accuracy Self-Alignment of Thin Silicon Dies on Plasma-Programmed Surfaces
Author(s)
Landesberger, C.
Hiroshima, M.
Weber, J.
Bock, K.
Hauptwerk
Handbook of 3D integration. Vol.3
Language
English
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Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT