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Overview of Bonding and Assembly for 3D Integration
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2014
Book Article
Titel
Overview of Bonding and Assembly for 3D Integration
Author(s)
Lu, J.J.-Q.
Zhang, D.
Ramm, P.
Hauptwerk
Handbook of 3D integration. Vol.3
Language
English
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Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT