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Design, technology, and application of integrated piezoresistive scanning thermal microscopy (SThM) microcantilever

: Janus, P.; Grabiec, P.; Sierakowski, A.; Gotszalk, T.; Rudek, M.; Kopiec, D.; Majstrzyk, W.; Boetsch, G.; Koehler, B.


Postek, M.T. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Scanning microscopies 2014 : 16 - 18 September 2014, Monterey, California, United States; including the "Microscopy for STEM Educators" Workshop
Bellingham, WA: SPIE, 2014 (Proceedings of SPIE 9236)
ISBN: 978-1-62841-299-4
Paper 92360R, 11 pp.
Scanning Microscopies Symposium <2014, Monterey/Calif.>
"Microscopy for STEM Educators" Workshop <2014, Monterey/Calif.>
Conference Paper
Fraunhofer IKTS ()

In this article we describe a novel piezoresistive cantilever technology The described cantilever can be also applied in the investigations of the thermal surface properties in all Scanning Thermal Microscopy (SThM) techniques. Batch lithography/etch patterning process combined with focused ion beam (FIB) modification allows to manufacture thermally active, resistive tips with a nanometer radius of curvature. This design makes the proposed nanoprobes especially attractive for their application in the measurement of the thermal behavior of micro- and nanoelectronic devices. Developed microcantilever is equipped with piezoresistive deflection sensor. The proposed architecture of the cantilever probe enables easy its easy integration with micro- and nanomanipulators and scanning electron microscopes. In order to approach very precisely the microcantilever near to the location to be characterized, it is mounted on a compact nanomanipulator based on a novel mobile technology. This technology allows very stable positioning, with a nanometric resolution over several centimeters which is for example useful for large samples investigations. Moreover, thanks to the vacuum-compatibility, the experiments can be carried out inside scanning electron microscopes.