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Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

: Santos, R.; D'Agostino, D.; Soares, F.M.; Rabbani Haghighi, H.; Smit, M.K.; Leijtens, X.J.M.

Optical Society of America -OSA-, Washington/D.C.:
Integrated photonics research, silicon and nanophotonics : Part of Advanced photonics for communications; 13 - 17 July 2014, San Diego, California, United States
Washington, DC: OSA, 2014
ISBN: 978-1-55752-737-0
Paper IM3A.3
Conference "Integrated Photonics Research, Silicon and Nanophotonics" <2014, San Diego/Calif.>
Conference Paper
Fraunhofer HHI ()

This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.