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  4. Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits
 
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2014
Conference Paper
Title

Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

Abstract
This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.
Author(s)
Santos, R.
D'Agostino, D.
Soares, F.M.
Rabbani Haghighi, H.
Smit, M.K.
Leijtens, X.J.M.
Mainwork
Integrated photonics research, silicon and nanophotonics  
Conference
Conference "Integrated Photonics Research, Silicon and Nanophotonics" 2014  
Language
English
Fraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI  
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