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2014
Conference Paper
Titel
Precision micro-optical elements for manufacturing of gas sensors using IR-absorption
Abstract
A growing number of micro optical electro-mechanical systems (MOEMS) are used in system applications like IR-detectors, projection displays or LIDAR systems. A new process technology has been developed for manufacturing precise optical components from borosilicate glass by 8-inch wafer batch processing. An improved process technology was applied for the first time for manufacturing of precise spherical mirrors of up to 8 mm diameter. The mirrors are assembled to realize a multiple reflection cell with low outer volume and a large internal optical absorption path. These cells are assembled as IR-absorption gas sensors. Quantities of precise lenses and mirrors can be produced at low costs by batch processing. The mirrors are covered with a metallic reflective coating. After that processing the optical elements are separated and mounted to realize a multi-reflection cell using two spherical mirrors. Examples for micromechanically actuated optical components are shown. With piezoelectric driven components a Fourier-Transformation IR-spectrometer might be set-up to be used in combination with the minimized absorption cell.