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Novel design concepts for piezoelectrically driven ohmic switches

: Stoppel, F.; Lisec, T.; Wagner, B.

Postprint (PDF; )

Procedia Engineering 87 (2014), pp.416-419
ISSN: 1877-7058
European Conference on Solid-State Transducers (Eurosensors) <28, 2014, Brescia>
Journal Article, Conference Paper, Electronic Publication
Fraunhofer ISIT ()

In this paper novel design concepts for ohmic RF-MEMS switches based on piezoelectric and electrostatic actuation are presented. In contrast to traditional cantilever designs the proposed concepts are based on circular and ring shaped piezo actuators offering significant advantages especially in providing high contact forces. As a result of a parametric study optimized designs have been developed which can deliver more than 2 mN force at small device sizes of less than 0.08 mm2. First actuator prototypes featuring 1 μm sputtered PZT films are currently being fabricated by means of MEMS technology.