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Design and optimization of flexure-based micromanipulator for optics alignment

 
: Brecher, C.; Pyschny, N.; Bastuck, T.

Leach, R. (Ed.) ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
13th International Conference of the European Society for Precision Engineering and Nanotechnology 2013. Proceedings. Vol.1 : 27th May to 31st May 2013, Berlin, Germany
Bedford: Euspen, 2013
ISBN: 978-0-9566790-2-4
pp.268-271
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) <13, 2013, Berlin>
English
Conference Paper
Fraunhofer IPT ()

Abstract
This paper presents the development of a novel flexure-based micromanipulator for the alignment of optical components (Figure 1). The realized device is based on a six-axis parallel mechanism and piezo-positioners using stick-slip principle and providing nanometre resolution. Results of this paper show that the flexure-based design allows realizing nanometre steps with the moving platform in all axes.

: http://publica.fraunhofer.de/documents/N-350643.html