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2013
Conference Paper
Titel
Terahertz transceiver microprobe for chip-inspection applications using optoelectronic time-domain reflectometry
Abstract
In this work a compact microprobe for advanced chip-inspection applications is introduced. The probe features integrated photoconductive switches for Terahertz pulse generation and detection. Device application is demonstrated for contact-free high-resolution time-domain reflectometry measurements at silicon-chip test structures.