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Terahertz transceiver microprobe for chip-inspection applications using optoelectronic time-domain reflectometry

: Nagel, M.; Matheisen, C.; Sawallich, S.; Dobritz, S.; Kurz, H.


IEEE Microwave Theory and Techniques Society; Fraunhofer-Institut für Physikalische Messtechnik -IPM-, Freiburg/Brsg.:
38th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2013 : Mainz, Germany, 1 - 6 September 2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-4717-4 (online)
ISBN: 978-1-4673-4715-0 (print)
2 pp.
International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) <38, 2013, Mainz>
Conference Paper
Fraunhofer IZM ()

In this work a compact microprobe for advanced chip-inspection applications is introduced. The probe features integrated photoconductive switches for Terahertz pulse generation and detection. Device application is demonstrated for contact-free high-resolution time-domain reflectometry measurements at silicon-chip test structures.