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ARS: An effective method for characterizing structural and alteration effects in thin film coatings

: Schröder, S.; Herffurth, T.; Blaschke, H.; Duparré, A.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2010. CD-ROM : Topical meeting and tabletop exhibit, June 6-11, 2010, Tucson, Arizona, USA. Technical digest
Washington, DC: OSA, 2010
ISBN: 978-1-55752-891-9
Paper ThD2
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2010, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()

Light scattering measurement and analysis based on a simplified scatter model for multilayer coatings is used to investigate structural and alteration effects of HR coatings for 193 nm as well as Rugate filters for 355 nm.