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Instrument for close-to-process light scatter measurements of thin film coatings and substrates

: Finck, A.V.; Hauptvogel, M.; Duparré, A.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2010. CD-ROM : Topical meeting and tabletop exhibit, June 6-11, 2010, Tucson, Arizona, USA. Technical digest
Washington, DC: OSA, 2010
ISBN: 978-1-55752-891-9
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2010, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()

Scatter analysis is an effective method for characterization of thin film components. For flexible and easy use in research and industry the high-sensitive table-top system ALBATROSS-TT with full 3D-spherical measurement capability has been developed.