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Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source

 
: Rudolf, D.; Bußmann, J.; Odstrcil, M.; Dong, M.; Bergmann, K.; Danylyuk, D.; Juschkin, L.

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Optics Letters 40 (2015), No.12, pp.2818-2821
ISSN: 0146-9592
English
Journal Article
Fraunhofer ILT ()

Abstract
Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.

: http://publica.fraunhofer.de/documents/N-347606.html