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Optical MEMS for advanced spectrometers

: Schenk, H.; Grüger, H.; Zimmer, F.; Scherf, W.; Kenda, A.


Kopola, H. ; IEEE Lasers and Electro-Optics Society:
IEEE/LEOS Optical MEMS 2005 : International Conference on Optical MEMS and Their Applications, 1-4 August 2005, Oulu, Finland
Piscataway, NJ: IEEE Service Center, 2005
ISBN: 0-7803-9278-7
International Conference on Optical MEMS and Their Applications <8, 2005, Oulu, Finland>
Conference Paper
Fraunhofer IPMS ()

Optical MEMS based spectrometers capable to perform time resolved measurements from VIS to NIR are presented. They are based on high frequency scanning gratings with V-groove-structure and translational mirrors for Fourier-Transform-Spectrometers, respectively.