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Optical MEMS for advanced spectrometers

 
: Schenk, H.; Grüger, H.; Zimmer, F.; Scherf, W.; Kenda, A.

:

Kopola, H. ; IEEE Lasers and Electro-Optics Society:
IEEE/LEOS Optical MEMS 2005 : International Conference on Optical MEMS and Their Applications, 1-4 August 2005, Oulu, Finland
Piscataway, NJ: IEEE Service Center, 2005
ISBN: 0-7803-9278-7
pp.117-118
International Conference on Optical MEMS and Their Applications <8, 2005, Oulu, Finland>
English
Conference Paper
Fraunhofer IPMS ()

Abstract
Optical MEMS based spectrometers capable to perform time resolved measurements from VIS to NIR are presented. They are based on high frequency scanning gratings with V-groove-structure and translational mirrors for Fourier-Transform-Spectrometers, respectively.

: http://publica.fraunhofer.de/documents/N-34727.html