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2005
Conference Paper
Titel
Material and layout improvements of planar electrolytic conductivity sensors
Abstract
Commercially available measurement devices are often limited to a fixed or small range measurement frequency, so sensors are required with an impedance characteristics that is dominated by the electrolytic conductivity parts across a large frequency range. The optimisation of planar conductivity sensors follows two directions. One is to apply an appropriate active electrode material the other is to design an optimised cell geometry. In this paper electrode design optimisations and investigations of Pt, PtSi, Ta and Ta/Ta2O5 electrodes are presented.
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