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Mikrospiegelanordnung

Micromirror arrangement
 
: Hofmann, Ulrich; Senger, Frank; Wantoch, Thomas; Mallas, Christian; Janes, Joachim

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Frontpage ()

DE 102013223933 A1: 20131122
German
Patent, Electronic Publication
Fraunhofer ISIT ()

Abstract
What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate (1) and first spring elements (2); a second spring-mass oscillator, which has a drive plate (3) and second spring elements (4) and which is connected to a carrier arrangement (5, 8, 9) via the second spring elements (4), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (2); and a drive arrangement (11), which is assigned to the drive plate and is designed to cause the drive plate (3) to oscillate. The oscillatory body (1) is suspended, movably on two axes, via the first spring elements (2) on the drive plate (3), and the drive plate (3) is connected, movably on two axes, to the carrier arrangement (5, 8, 9), wherein the drive arrangement (11) is embodied as a two-axis drive and is designed to drive the drive plate (3) on two axes such that the oscillatory body (1) oscillates on two axes at in each case one of its orthogonal eigenmodes or close to this eigenmode.

: http://publica.fraunhofer.de/documents/N-345477.html