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Scanning ND:YAG laser system for industrially applicable processing in silicon solar cell manufacturing

: Schneiderlöchner, E.; Grohe, A.; Glunz, S.W.; Preu, R.; Willeke, G.

Kurokawa, K. ; Institute of Electrical and Electronics Engineers -IEEE-:
3rd World Conference on Photovoltaic Energy Conversion 2003. Proceedings. Vol.B : Joint conference of 13th PV Science & Engineering Conference, 30th IEEE PV Specialists Conference, 18th European PV Solar Energy Conference ; Osaka International Congress Center "Grand Cube", Osaka, Japan, 11 - 18 May 2003
Osaka, 2003
ISBN: 4-9901816-1-1
World Conference on Photovoltaic Energy Conversion (WCPEC) <3, 2003, Osaka>
PV Science and Engineering Conference <13, 2003, Osaka>
PV Specialists Conference <30, 2003, Osaka>
European PV Solar Energy Conference <18, 2003, Osaka>
Conference Paper
Fraunhofer ISE ()

In order to demonstrate different laser beam processes for solar cell manufacturing a state of the art high power scanning laser system has been installed at 'Fraunhofer ISE'. The high potential of laser beam techniques is mainly based on the contactless operation, making them suitable for fragile silicon wafers, and their in-line suitability. Besides, the laser process can be accurately controlled and hence, a perfect reproducibility is obtained even at high pulse repetition rates. Combined with the feed speed of the scanned laser beam of up to 10 m/s this allows short process times as necessary for industrial throughput. Laser beam applications that are presently under investigation are first the 'Laser-Fired Contacts' (called LFC), a technique for implementing the rear contact of dielectric passivated solar cells, and second 'Laser edge IS olation' (called LIS).