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Structural characterization of laser bonded sapphire wafers using a titanium absorber thin film

 
: Pablos-Martin, A. de; Tismer, S.; Höche, T.

:

Journal of materials science & technology : JMST 31 (2015), No.5, pp.484-488
ISSN: 1005-0302
ISSN: 1000-3029
English
Journal Article
Fraunhofer IWM ( IMWS) ()

Abstract
Two sapphire substrates were tightly bonded by irradiation with a 1064 nm nanosecond laser and using a sputtered 50 nm-titanium thin film as an absorbing medium. Upon laser irradiation, aluminum from the upper substrate is incorporated into the thin film, forming Ti-Al-O compounds. While the irradiated region becomes transparent, the bond quality was evaluated by scanning acoustic microscopy.

: http://publica.fraunhofer.de/documents/N-343516.html