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Drift free, highly planar silicon micromirror arrays

: Völker, B.; Friedrichs, M.; Rudloff, D.; Bakke, T.

	16th MicroMechanics Europe Workshop, MME 2005. Proceedings Göteborg: InformTrycket AB, 2005 ISBN: 91-631-7553-3 pp.223-226
	MicroMechanics Europe Workshop (MME) <16, 2005, Göteborg, Sweden> Workshop on Micromachining, Micromechanics and Microsystems <16, 2005, Göteborg>

	English
	Conference Paper
	Fraunhofer IPMS ()
	monocrystalline silicon; mirror array; CMOS; tungsten plug; plastic deformation; drift free

Abstract
Simple monocrystalline silicon micromirror arrays have been fabricated using a CMOS compatible tungsten plug process. Mirror planarity and pre-deflection was characterized. It was found that the properties of these mirrors are superior to those previously made of aluminum.

: http://publica.fraunhofer.de/documents/N-34227.html